Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session DF1: Plasmas and Nanotechnology III
8:00 AM–9:00 AM,
Friday, October 7, 2022
Sendai International Center
Room: Tachibana
Chair: Renato Camata, University of Alabama
Abstract: DF1.00003 : Ion fluxes in EUV-induced plasma and their applications for optical components tests*
8:45 AM–9:00 AM
Author not Attending
Presenter:
Andrey Ushakov
(TNO)
Authors:
Andrey Ushakov
(TNO)
Jacqueline van Veldhoven
(TNO)
Chien-Ching Wu
(TNO)
Michel van Putten
(TNO)
Joop Meijlink
(TNO)
Collaboration:
TNO
*This work was supported in part by the Netherlands Top Consortium for Knowledge and Innovation Research Grant (Dutch: "Topconsortia voor Kennis en Innovatie") in 2019.
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