74th Annual Gaseous Electronics Conference
Volume 66, Number 7
Monday–Friday, October 4–8, 2021;
Virtual: GEC Platform
Time Zone: Central Daylight Time, USA
Session Index
Session PR22: Plasma Etch
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Show Abstracts |
Chair: Sebastian Wilczek, Ruhr-University Bochum, Germany
Room: Virtual GEC platform
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Thursday, October 7, 2021
10:15AM - 10:45AM
Not Participating
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PR22.00001: An In-house Rigorous Etching Model for Process Recipe Tuning
Invited Speaker:
Wei Tian
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Thursday, October 7, 2021
10:45AM - 11:00AM
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PR22.00002: In-plasma, vacuum ultraviolet photon-assisted etching of silicon
Vincent Donnelly, Linfeng Du, Emilia Hirsch, Demetre J Economou, Paul Ruchhoeft
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Thursday, October 7, 2021
11:00AM - 11:15AM
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PR22.00003: Molecular dynamic simulation of glancing-angle scatterings on different materials in a high aspect ratio etching process
Yao Du, Steven Shannon, Sang Ki Nam, Hoki Lee
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Thursday, October 7, 2021
11:15AM - 11:30AM
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PR22.00004: Mitigating the effects of surface charging during high aspect ratio plasma etching using voltage waveform tailoring
Florian Krüger, Hyunjae Lee, Sang Ki Nam, Mark J Kushner
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Thursday, October 7, 2021
11:30AM - 11:45AM
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PR22.00005: Computational study of plasma dynamics and reactive chemistry in a low-pressure inductively coupled CF4/O2 plasma
Dmitry Levko, Chandrashekar Shukla, Rochan Upadhyay, Laxminarayan L Raja
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Thursday, October 7, 2021
11:45AM - 12:00PM
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PR22.00006: E-H Transitions in Ar/O2 Inductively Coupled Plasmas for Varying Antenna Aspect Ratio - Experiment
Walter N Gekelman, Patrick Pribyl, Yuchen Qian, Alex Paterson, Tugba Piskin, Mark J Kushner
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Thursday, October 7, 2021
12:00PM - 12:15PM
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PR22.00007: Consequences of photodetachment in pulsed Ar/O2 and Ar/Cl2 inductively coupled plasmas
Tugba Piskin, Yunchen Qian, Patrick Pribyl, Walter N Gekelman, Mark J Kushner
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Thursday, October 7, 2021
12:15PM - 12:30PM
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PR22.00008: Evaluation of charge density at hole bottom of capillary plates in a pulsed dual-frequency capacitively coupled plasma
Haruka Suzuki, Makoto Moriyama, Naoya Nakahara, Hirotaka Toyoda
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