Bulletin of the American Physical Society
74th Annual Gaseous Electronics Conference
Volume 66, Number 7
Monday–Friday, October 4–8, 2021;
Virtual: GEC Platform
Time Zone: Central Daylight Time, USA
Session KW74: Basic Plasma Physics Phenomena in Low-temperature Plasmas I
3:45 PM–5:30 PM,
Wednesday, October 6, 2021
Virtual
Room: GEC platform
Chair: Alex Likhanskii, Applied Materials, Inc.
Abstract: KW74.00005 : External plate biasing and diverging magnetic field effects on radial characteristics of back diffused expanding plasma column *
5:00 PM–5:15 PM
Presenter:
SATADAL DAS
(INSTITUTE FOR PLASMA RESEARCH)
Authors:
SATADAL DAS
(INSTITUTE FOR PLASMA RESEARCH)
Shantanu Karkari
(Institute for Plasma Research, India)
Collaboration:
NA
In this work the combined effect of electrode biasing and diverging magnetic field have been investigated from radial plasma characteristics for back-diffused, partially magnetized argon plasma column, created by hot cathode filament inside a linear plasma device.
It is seen that the radial gradient in plasma density and potential variation of back diffused plasma tend to reduce with applying a positive potential to a remotely located electrode. However, the radial gradient in plasma parameters variation inside the source and biasing region tend to increase. This observation gives a detailed insight into how the current closer/sharing between different regions of plasma column can influence the radial control of plasma parameters due to biasing of the electrode from remote location. A possible mechanism is given to explain the observed trends.
*Instiute for Plasma Research, DAE, HBNI, India
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