Bulletin of the American Physical Society
74th Annual Gaseous Electronics Conference
Volume 66, Number 7
Monday–Friday, October 4–8, 2021;
Virtual: GEC Platform
Time Zone: Central Daylight Time, USA
Session JW61: Capacitively Coupled Plasmas II
2:00 PM–3:15 PM,
Wednesday, October 6, 2021
Virtual
Room: GEC platform
Chair: Mark Koepke, West Virginia University
Abstract: JW61.00004 : The effect of a negative direct-current voltage on striated structures and electrical parameters in a capacitively coupled rf discharge in CF4*
2:45 PM–3:00 PM
Presenter:
Xiao-Kun Wang
(Dalian University of Technology)
Authors:
Xiao-Kun Wang
(Dalian University of Technology)
Yong-Xin Liu
(Dalian University of Technology)
Quan-Zhi Zhang
(Dalian University of Technology)
You-Nian Wang
(Dalian University of Technology)
*This work has been financially supported by the National Natural Science Foundation of China (NSFC) (Grants No. 11875100, No. 11935005, and No. 11722541), and the Fundamental Research Funds for the Central Universities (Grant No. DUT18TD06, DUT20LAB201).
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