Bulletin of the American Physical Society
74th Annual Gaseous Electronics Conference
Volume 66, Number 7
Monday–Friday, October 4–8, 2021;
Virtual: GEC Platform
Time Zone: Central Daylight Time, USA
Session HW14: Plasma-surface Interactions II
8:00 AM–9:45 AM,
Wednesday, October 6, 2021
Virtual
Room: GEC platform
Chair: Shaun Smith, Lam Research
Abstract: HW14.00001 : Molybdenum Erosion in an Hollow Cathode-like Iodine Plasma Enviroment
8:00 AM–8:15 AM
Presenter:
James D Rogers
(The University of Alabama)
Authors:
James D Rogers
(The University of Alabama)
Richard Branam
(The University of Alabama)
In this work, we investigate the impact that a hollow cathode-like iodine plasma environment has on molybdenum. An RF inductively coupled plasma source is used to approximate the plasma environment of a hollow cathode. Molybdenum material samples were exposed to three different conditions: iodine plasma, iodine vapor, and argon plasma. In each case, the molybdenum samples were exposed to multiple different high temperatures ranging from 1500K to 2000K. The plasma cases were additionally performed for several different plasma densities.
Molybdenum is expected to perform well under iodine vapor conditions due to being relatively chemically resistant. The material samples underwent a dramatic change in surface grain structure during the tests due to the high temperatures used. Molybdenum does not experience a significant change in material color before and after iodine testing.
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