A study on the self-consistent step-wise global model: chamber geometry effect *

The global model based on the fluid approximation is a one of the efficient methods to understand the plasma parameters, such as electron temperature, excited densities, and plasma density, etc. In this study, we investigated the chamber geometry effect on the plasma parameters in argon inductively coupled plasmas using a self-consistent step-wise global model. External factors such as power, pressure, and chamber dimensions have been shown to significantly influence changes in plasma parameters and discharge characteristics.