Plasma Diagnostics on an Atmospheric Pressure DC Microplasma Discharge Intended for in situ TEM Integration*

One of the most discussed topics in plasma technology is the plasma surface interaction due to its relevance for the production or modification of micro- or even nano-structured surfaces. State of the art analysis is mostly limited to the separation of plasma processing and surface analysis, since observing surface changes in real time and at nanoscale resolution during the plasma treatment is challenging. With the development of a DC microplasma discharge cell for in situ TEM integration based on the proof of principle experiments by Tai et al. [1] we aim to overcome this limitation.

Conventional (electrical measurements, optical imaging and emission spectroscopy) as well as non-conventional (calorimetry [2]) plasma diagnostics have been applied to characterize the microplasma, ensure its stability, and provide sufficient insight for a better understanding of the, till today, ex situ observed plasma-generated surface changes, which depend on the plasma parameters. The cell design and experimental results will be presented and a report on the current progress of the in situ measurements will be given.

[1] K Tai et al 2013 Scientific Reports 3 1325

[2] H Kersten et al 2001 Vacuum 63 385-431