Tuesday, October 5, 2021
8:00AM - 8:15AM
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CT14.00001: Validation of Hybrid Electron Particle-In-Cell (PIC)-Ion Fluid Plasma Simulation Methodology for Low Pressure Capacitively Coupled Plasma (CCP) Chambers
Sathya S Ganta, Shahid Rauf, Peng Tian, Kallol Bera, Manuel Schröder, Ihor Korolov, Julian Schulze
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Tuesday, October 5, 2021
8:15AM - 8:30AM
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CT14.00002: Validation and Verification Methods for the Open Source Code: Zapdos
Corey S DeChant, Casey T Icenhour, Grayson Gall, Shane Keniley, Alexander D Lindsay, Davide Curreli, Steven Shannon
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Tuesday, October 5, 2021
8:30AM - 8:45AM
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CT14.00003: Particle-in-cell modeling and experimental diagnosis of dual-frequency capacitively-coupled oxygen discharge
Han Luo, Peng Tian, Jason Kenney, Shahid Rauf, Julian Schulze, Ihor Korolov
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Tuesday, October 5, 2021
8:45AM - 9:00AM
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CT14.00004: Analytical model for estimating plasma parameters in a planar diode
Haomin Sun, Jian Chen, Alexander V Khrabrov, Igor Kaganovich, David Smith, Svetlana Selezneva, Dmytro Sydorenko
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Tuesday, October 5, 2021
9:00AM - 9:15AM
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CT14.00005: Effect of dynamic particle reweighting on plasma swarm parameters in the particle-in-cell code Aleph
Taylor H Hall, Jeremiah Boerner, Zakari Eckert, Russell Hooper, Jose Pacheco
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Tuesday, October 5, 2021
9:15AM - 9:30AM
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CT14.00006: Particle-In-Cell Modeling of Capacitively Coupled Argon Discharges in a Wide Range of Frequencies
Saurabh H Simha, Sergey Macheret, Jonathan Poggie, Igor Kaganovich, Alexander V Khrabrov
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Tuesday, October 5, 2021
9:30AM - 9:45AM
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CT14.00007: 2D simulation of the positive streamer in SF6: effect of high attachment rate in atmospheric and sub atmospheric pressures.
Francis Boakye-Mensah, Nelly Bonifaci, Rachelle Hanna, Innocent Niyonzima, Igor Timoshkin
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Tuesday, October 5, 2021
9:45AM - 10:00AM
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CT14.00008: Experimental Validation of Particle-in-Cell/Monte Carlo Collision simulation coupled with Collisional Radiative Model by Optical Emission Spectroscopy
Fatima Jenina T Arellano, Zoltan Donko, Peter Hartmann, Tsanko Vaskov Tsankov, Uwe Czarnetzki, Satoshi Hamaguchi
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