Bulletin of the American Physical Society

73rd Annual Gaseous Electronics Virtual Conference

Volume 65, Number 10

Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.

Session Index

Session XF3: Plasma Etching

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Chair: Wei Tian, Taiwan Semiconductor Manufacturing Corporation

Friday, October 9, 2020 9:45AM - 10:15AM Live		XF3.00001: Advancements in Feature Scale Simulations Invited Speaker: Paul Moroz Preview Abstract
Friday, October 9, 2020 10:15AM - 10:30AM Live		XF3.00002: Optimization of Etching Recipes for Si Trenches with Self-Aligned Quadruple Patterning Mask by Transfer Learning Naoto Takano, Hyakka Nakada, Takeshi Omori Preview Abstract
Friday, October 9, 2020 10:30AM - 10:45AM Live		XF3.00003: Quantum Tunneling with Space Charge Effects in Thin Insulating Gaps. Sneha Banerjee, Peng Zhang Preview Abstract
Friday, October 9, 2020 10:45AM - 11:15AM Live		XF3.00004: Dynamics of physicochemical reactions in time-modulation of plasmas for advanced semiconductor processes Invited Speaker: Masaru Hori Preview Abstract

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Bulletin of the American Physical Society

73rd Annual Gaseous Electronics Virtual Conference

Volume 65, Number 10

Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.

Session Index

Session XF3: Plasma Etching

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