Bulletin of the American Physical Society
73rd Annual Gaseous Electronics Virtual Conference
Volume 65, Number 10
Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.
Session TR2: Inductively Coupled PlasmasLive
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Chair: Thomas Mussenbrock, Cottbus University, Germany |
Thursday, October 8, 2020 10:00AM - 10:30AM Live |
TR2.00001: Multi-fluid modeling of low-temperature plasmas at low-pressure Invited Speaker: Alejandro Alvarez Laguna Most of the fluid models for gas discharges are based on the drift-diffusion approximation that neglects the inertial terms of the different species within plasma. However, the drift-diffusion approximation fails at low-pressure, when the ion mean-free-path become larger or comparable to the size of the device. Alternatively, we propose the resolution of velocity-moment closure hierarchies, also known as multi-fluid models. These models contain the inertial terms and solve for higher moments, i.e., mass, momentum, energy, heat flux, etc, for each of the species within plasma. The resolution of higher moments allows for capturing non-equilibrium phenomena, consequence of deviations from the Maxwellian distribution. We will show that multi-fluid models are able to correctly capture the plasma-sheath transition and the evolution of macroscopic variables of the discharge at low-pressure, as compared to PIC simulations. For this, we will study different 1D and 2D ICP discharges with and without the presence of a magnetic field and compare them to PIC simulations. The integration of the collisional terms for different gases as well as the numerical methods will be discussed. [Preview Abstract] |
Thursday, October 8, 2020 10:30AM - 10:45AM Live |
TR2.00002: Investigating Effects of Operating Conditions on the Properties of Inductively Coupled Plasma Produced by the Conical and Fassel Torches Xiaoman Guo, Sina Alavi, Elham Dalir, Javad Mostaghimi Inductively coupled plasma (ICP) is a powerful excitation/ionization source. In this work, systematic investigation about the combined effects of operating conditions on the properties of ICP is conducted by experiments and simulations. The excitation temperature and electron number density of the new Conical torch ICP and conventional Fassel torch ICP are studied and compared under a wide array of conditions. Two power levels and three injector tubes are investigated for both torches, while three intermediate gas flow rates are tested for the Fassel torch. The Conical torch at 900 W is shown to offer 400 K -- 1200 K higher excitation temperature and 0.5 -- 2 times higher electron number density compared with the Fassel torch at 1500 W and 1100 W. Also, smaller injector tube is found to increase the excitation temperature and electron number density for both torches. Moreover, for the Fassel torch, lower intermediate gas flow rate is shown to offer better values but can also bring the position change and strong circulation. In general, the Conical torch, with less gas and power consumption, presents better properties than the Fassel torch. This comprehensive investigation is expected to contribute to the development of ICP systems for further applications. [Preview Abstract] |
Thursday, October 8, 2020 10:45AM - 11:00AM Live |
TR2.00003: Incorporation of transient dependent feedback mechanisms in the inductive transformer matrix model: implications on pulsed power delivery Carl Smith, Steven Shannon, Sang-Ki Nam Many of the assumptions made by equivalent circuit models of inductively coupled plasmas make accurate modeling of these discharges under transient conditions inaccurate, particularly in cases where power is being applied.~ Lossless power delivery to the plasma, a thin skin depth approximation for the plasma transformer,$~$and an assumption of a Maxwellian EEDF throughout the duration of the transient all contribute to significant deviations when compared to experimental observations. Various feedback mechanisms are accounted for in this work, which include- the incorporation of a lump sum circuit model into the transformer matrix equivalent circuit model, the accounting for a finite skin depth dependence in the transformer model,$^{~}$~and the incorporation of a transient dependent EEDF that is modulated by the evolution of~$n_{e~}$and~$T_{e~}_{\mathrm{~}}$over the course of a plasma pulse. Integration of these terms into a transformer circuit model reveal that~\textit{dT}$_{e}$\textit{/dt}, and~\textit{dn}$_{e}$\textit{/dt~}both show a significant delay over the course of a plasma pulse.~ The impact of these terms on the plasma model and a comparison to experimental results will be presented. [Preview Abstract] |
Thursday, October 8, 2020 11:00AM - 11:15AM Live |
TR2.00004: Novel Industrial Scale Radio Frequency Inductively Coupled Plasma Torch Patrick Mirek, Sina Alavi, Javad Mostaghimi A novel industrial-scale radio-frequency inductively coupled plasma (RF-ICP) torch design is proposed which uses a conical geometry, with the goal of reducing gas {\&} power consumption and increasing powder spheroidization efficiency. The investigation was conducted using the ANSYS Fluent software, by simulating the injection of powder particles into the plasma discharge produced by the RF-ICP torch. The simulations use an in-house numerical model which was developed to account for the electromagnetic phenomena. The simulations are used to optimize the conical torch and compare its performance to a conventional RF-ICP torch. It was found that the new conical torch achieves spheroidization ratios up to 2 times higher than the conventional torch, due to 3x higher axial temperatures and an induction zone closer to particles. Additionally, it runs at 42{\%} lower gas consumption and can achieve industrially acceptable spheroidization ratios at half the power level of the conventional torch. In industrial applications, this new conical torch can provide significant savings in cost, gas, and power, while increasing processing speeds and improving the quantity of processed powder particles. [Preview Abstract] |
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