Bulletin of the American Physical Society
73rd Annual Gaseous Electronics Virtual Conference
Volume 65, Number 10
Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.
Session TR2: Inductively Coupled Plasmas
10:00 AM–11:15 AM,
Thursday, October 8, 2020
Chair: Thomas Mussenbrock, Cottbus University, Germany
Abstract: TR2.00004 : Novel Industrial Scale Radio Frequency Inductively Coupled Plasma Torch
11:00 AM–11:15 AM
Live
Preview Abstract Abstract
Authors:
Patrick Mirek
(Center for Advanced Coating Technologies, University of Toronto)
Sina Alavi
(Center for Advanced Coating Technologies, University of Toronto)
Javad Mostaghimi
(Center for Advanced Coating Technologies, University of Toronto)
Collaboration:
Center for Advanced Coating Technologies
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