Bulletin of the American Physical Society
73rd Annual Gaseous Electronics Virtual Conference
Volume 65, Number 10
Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.
Session GT2: Capacitively Coupled Plasmas I
10:00 AM–12:30 PM,
Tuesday, October 6, 2020
Chair: Julian Schulze, Ruhr-University Bochum, Germany
Abstract: GT2.00003 : The effect of gas pressure on the nonlinear harmonic excitation in very high frequency asymmetric capacitive discharges*
11:00 AM–11:15 AM
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Abstract
Authors:
Jian-Kai Liu
(Dalian University of Technology; University of California, Berkeley)
Emi Kawamura
(University of California, Berkeley)
Michael Lieberman
(University of California, Berkeley)
Allan Lichtenberg
(University of California, Berkeley)
You-Nian Wang
(Dalian University of Technology)
*This work was supported by the DOE Office of Fusion Energy Science Contract No.DE-SC0001939, NSFC (Grant No.11935005), FRFCU (Grant No. DUT18TD06), China Scholarship Council, and a gift from Applied Materials Corporation, AKT Display Group.
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