73rd Annual Gaseous Electronics Virtual Conference
Volume 65, Number 10
Monday–Friday, October 5–9, 2020;
Time Zone: Central Daylight Time, USA.
Session Index
Session GT2: Capacitively Coupled Plasmas I
Live
|
Show Abstracts |
Chair: Julian Schulze, Ruhr-University Bochum, Germany
|
|
Tuesday, October 6, 2020
10:00AM - 10:30AM
Live
|
|
GT2.00001: Operation characteristics of high-Voltage, low-pressure CCPs targeting etching applications
Invited Speaker:
Peter Hartmann
Preview Abstract |
Tuesday, October 6, 2020
10:30AM - 11:00AM
Live
|
|
GT2.00002: Nonlinear standing wave effect and plasma uniformity in very-high-frequency capacitively coupled plasmas
Invited Speaker:
Yong-Xin Liu
Preview Abstract |
Tuesday, October 6, 2020
11:00AM - 11:15AM
Live
|
|
GT2.00003: The effect of gas pressure on the nonlinear harmonic excitation in very high frequency asymmetric capacitive discharges
Jian-Kai Liu, Emi Kawamura, Michael Lieberman, Allan Lichtenberg, You-Nian Wang
Preview Abstract |
Tuesday, October 6, 2020
11:15AM - 11:30AM
Live
|
|
GT2.00004: Experimental verification of 1d3v PIC/MCC simulations of capacitive RF plasmas operated in argon
David A. Schulenberg, Ihor Korolov, Zoltan Donko, Aranka Derzsi, Julian Schulze
Preview Abstract |
Tuesday, October 6, 2020
11:30AM - 11:45AM
Live
|
|
GT2.00005: The difference between electron heating and power absorption in capacitively coupled plasmas
Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trischmann, Thomas Mussenbrock
Preview Abstract |
Tuesday, October 6, 2020
11:45AM - 12:00PM
Live
|
|
GT2.00006: Electrical Asymmetry Effect in Very High Frequency Capacitively Coupled Plasmas
Xiaopu Li, Kallol Bera, Shahid Rauf
Preview Abstract |
Tuesday, October 6, 2020
12:00PM - 12:15PM
Live
|
|
GT2.00007: Effects of Focus Ring in Capacitively Coupled Plasma Based on 1D Circuit Modeling and Experiments
Yuhua Xiao, Yao Du, Sang-Ki Nam, Steven Shannon
Preview Abstract |
Tuesday, October 6, 2020
12:15PM - 12:30PM
On Demand
|
|
GT2.00008: High-Energy Ballistic Electrons in Low-Pressure Radio-Frequency Plasmas.
Yangyang Fu, Bocong Zheng, De-Qi Wen, Peng Zhang, Qi Hua Fan, John P. Verboncoeur
Preview Abstract |
