72nd Annual Gaseous Electronics Conference
Volume 64, Number 10
Monday–Friday, October 28–November 1 2019;
College Station, Texas
Session Index
Session RR1: Capacitively Coupled Plasmas II
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Chair: Julian Schulze, Ruhr-University Bochum, Germany
Room: Century I
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Thursday, October 31, 2019
4:00PM - 4:30PM
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RR1.00001: Investigation on the plasma uniformity of a capacitively coupled plasma reactor using a two-dimensional GPU-based particle-in-cell simulation
Invited Speaker:
Hae June Lee
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Thursday, October 31, 2019
4:30PM - 4:45PM
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RR1.00002: A novel large-area sputtering process with tunable coating properties in multi-frequency capacitively coupled plasmas based on the Electrical Asymmetry Effect
David Schulenberg, Stefan Ries, Peter Awakowicz, Julian Schulze, Lars Banko, Alfred Ludwig, Daniel Primetzhofer, Marcus Hans, Jochen M. Schneider
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Thursday, October 31, 2019
4:45PM - 5:00PM
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RR1.00003: Observation of electron series resonance in transversely magnetized 13.56 MHz CCP discharge
Jay Joshi, Shikha Binwal, Shantanu Karkari, Sunil Kumar
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Thursday, October 31, 2019
5:00PM - 5:15PM
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RR1.00004: Investigation of Variable Excitation Frequency Capacitively Coupled Plasmas at Probing Frequencies up to 3 GHz
Andrei Khomenko, Taehwan Seo, Sergey Macheret
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Thursday, October 31, 2019
5:15PM - 5:30PM
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RR1.00005: Study the excitation of high frequency waves and its effect on plasma properties in weakly magnetized capacitive discharge
Sarvesh Sharma, Shali Yang, Alexander V. Khrabrov, Igor Kaganovich, Wei Jiang
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Thursday, October 31, 2019
5:30PM - 5:45PM
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RR1.00006: Validation Studies using ELK and the Open Source MOOSE Framework Application Zapdos for Electromagnetic Coupled Plasma Simulation
Casey Icenhour, Corey DeChant, Alexander Lindsay, Richard Martineau, David Green, Steven Shannon
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