70th Annual Gaseous Electronics Conference
Volume 62, Number 10
Monday–Friday, November 6–10, 2017;
Pittsburgh, Pennsylvania
Session Index
Session AM1: Linking Academia & Industry
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Chair: Julian Schulze, West Virginia University/Bochum University
Room: Salon D
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Monday, November 6, 2017
9:00AM - 9:30AM
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AM1.00001: Characterization and diagnostics of RF plasmas under manufacturing conditions
Michael Klick
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Monday, November 6, 2017
9:30AM - 10:00AM
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AM1.00002: Progress on Voltage Waveform Tailoring for plasmas: From science to process, from lab to fab
Erik Johnson, Sebastien Dine, Jean-Paul Booth
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Monday, November 6, 2017
10:00AM - 10:30AM
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AM1.00003: The status of etching processes in semiconductor fabrication, and upcoming challenges.
Jin-Young Bang, Sungil Cho
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Monday, November 6, 2017
10:30AM - 11:00AM
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AM1.00004: Successes, Failures, and Lessons Learned Navigating Industry Supported Research in Academia
Steven Shannon
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Monday, November 6, 2017
11:00AM - 11:30AM
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AM1.00005: Application Perspective of Plasma Science and Technology for Food and Agriculture
Wonho Choe, Cheorun Jo, Youbong Lim, Suk-Jae Yoo
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Monday, November 6, 2017
11:30AM - 12:00PM
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AM1.00006: The application of the multipole resonance probe to industrially relevant processes
Moritz Oberberg, Marcel Fiebrandt, Stefan Ries, Christian Woelfel, Peter Awakowicz
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