Bulletin of the American Physical Society

69th Annual Gaseous Electronics Conference

Volume 61, Number 9

Monday–Friday, October 10–14, 2016; Bochum, Germany

Session Index

Session NW1: Laser-Based Diagnostics I

Chair: Tsuyohito Ito, Osaka University
Room: 1

Wednesday, October 12, 2016 3:00PM - 3:30PM		NW1.00001: Development and application of laser-collision induced fluorescence for studying dynamic and structured plasmas Invited Speaker: Edward Barnat Preview Abstract
Wednesday, October 12, 2016 3:30PM - 3:45PM		NW1.00002: Detection of beam-crossing Doppler shift using an optical vortex beam Mitsutoshi Aramaki, Shinji Yoshimura, Yasunori Toda, Tomohiro Morisaki, Kenichiro Terasaka, Masayoshi Tanaka Preview Abstract
Wednesday, October 12, 2016 3:45PM - 4:00PM		NW1.00003: High Sensitive Temperature Measurement of Microwave Plasma using Wavelength Modulation Spectroscopy Tohru Yamada, Makoto Matsui, Taito Kawakami Preview Abstract
Wednesday, October 12, 2016 4:00PM - 4:15PM		NW1.00004: Spatiotemporal Evolution of Ar($^{\mathrm{3}}$P$_{\mathrm{2}})$ Metastable Density Generated in a Pulsed DC Atmospheric Pressure micro-Plasma Jet Impinging on a Glass Plate K. Gazeli, G. Bauville, Et-T. Es-Sebbar, M. Fleury, O. Neveau, St. Pasquiers, J. Santos Sousa Preview Abstract
Wednesday, October 12, 2016 4:15PM - 4:30PM		NW1.00005: Cavity-enhanced absorption spectroscopy to characterize atmospheric pressure plasma jets Jean-Pierre van Helden, Andy Nave, Stephan Reuter, Juergen Roepcke, Michele Gianella, Grant Ritchie Preview Abstract
Wednesday, October 12, 2016 4:30PM - 4:45PM		NW1.00006: An improved model to analyze Langmuir probe assisted photo-detachment signal for measuring electronegative plasma parameters Nishant Sirse, Noureddine Oudini, Abderrezeg Bendib, Albert R Ellingboe Preview Abstract
Wednesday, October 12, 2016 4:45PM - 5:00PM		NW1.00007: Real-time monitoring of reactive species in downstream etch reactor by VUV broad-band absorption spectroscopy. R. Soriano, L. Vallier, G. Cunge, N. Sadeghi Preview Abstract

Session NW2: Plasma Etching

Chair: Pascal Chabert, Ecole Polytechnique
Room: 2a

Wednesday, October 12, 2016 3:00PM - 3:30PM		NW2.00001: Layer by layer etching of LaAlSiO$_{\mathrm{x}}$ Invited Speaker: Hisataka Hayashi Preview Abstract
Wednesday, October 12, 2016 3:30PM - 3:45PM		NW2.00002: Variation in photon-induced interface defects due to transient behavior of pulse modulated inductively coupled plasma Y. Miyoshi, M. Fukasawa, K. Nagahata, T. Tatsumi, Z. Liu, Y. Zhang, A. Ando, K. Takeda, K. Ishikawa, M. Sekine, M. Hori Preview Abstract
Wednesday, October 12, 2016 3:45PM - 4:00PM		NW2.00003: Computer modelling of cryogenic etching in SF6/O2/SiF4 and CxFy inductively coupled plasmas Quan-Zhi Zhang, Annemie Bogaerts Preview Abstract
Wednesday, October 12, 2016 4:00PM - 4:15PM		NW2.00004: Temporal evolution of as-developed line and space photoresist profiles during etch. Barton Lane, Peter Ventzek, Alok Ranjan, Vinayak Rastogi, Jun Yoshikawa Preview Abstract
Wednesday, October 12, 2016 4:15PM - 4:30PM		NW2.00005: Origin of plasma-induced surface roughening and ripple formation during plasma etching Kouichi Ono, Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi Preview Abstract
Wednesday, October 12, 2016 4:30PM - 4:45PM		NW2.00006: Tailored Voltage Waveforms in an SF6/O2 discharge: slope asymmetry and its effect on surface nanotexturing of silicon G. Fischer, E. Drahi, G. Poulain, B. Bruneau, E. V. Johnson Preview Abstract
Wednesday, October 12, 2016 4:45PM - 5:00PM		NW2.00007: WITHDRAWN ABSTRACT Preview Abstract

Session NW3: Surface and Dielectric Barrier Discharges

Chair: Timo Gans, University of York
Room: 2b

Wednesday, October 12, 2016 3:00PM - 3:15PM		NW3.00001: Surface discharges generated at metal-semiconductor-gas triple junctions. David Pai, David Babonneau, Sophie Camelio, Sven Stauss, Kazuo Terashima Preview Abstract
Wednesday, October 12, 2016 3:15PM - 3:30PM		NW3.00002: Zero dimensional model of atmospheric SMD discharge and afterglow in humid air Ryan Smith, Efe Kemaneci, Bjoern Offerhaus, Katharina Stapelmann, Ralph Peter Brinkmann Preview Abstract
Wednesday, October 12, 2016 3:30PM - 3:45PM		NW3.00003: Study on the mode-transition of nanosecond-pulsed dielectric barrier discharge between uniform and filamentary by controlling pressures and pulse repetition frequencies Sizhe Yu, Xinpei Lu Preview Abstract
Wednesday, October 12, 2016 3:45PM - 4:00PM		NW3.00004: Influence of the gap size and dielectric constant of the packing on the plasma discharge in a packed bed dielectric barrier discharge reactor: a fluid modeling study Koen Van Laer, Annemie Bogaerts Preview Abstract
Wednesday, October 12, 2016 4:00PM - 4:15PM		NW3.00005: Properties Influencing Plasma Discharges in Packed Bed Reactors Juliusz Kruszelnicki, Kenneth W. Engeling, John E. Foster, Mark J. Kushner Preview Abstract
Wednesday, October 12, 2016 4:15PM - 4:30PM		NW3.00006: Investigation of the Time Evolution and Species Production in a 2-Dimensional Packed Bed Reactor Kenneth Engeling, Juliusz Kruszelnicki, Mark Kushner, John Foster Preview Abstract
Wednesday, October 12, 2016 4:30PM - 4:45PM		NW3.00007: 100{\%} N$_{\mathrm{2}}$ atmospheric-pressure microwave-line-plasma production with a modified waveguide structure Haruka Suzuki, Yuto Tamura, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda Preview Abstract
Wednesday, October 12, 2016 4:45PM - 5:00PM		NW3.00008: Simplified modeling of pulsed corona for dielectric design of high-voltage devices Sergey Pancheshnyi, Thomas Schefer Preview Abstract

Session NW4: Basic Plasma Physics I

Chair: Peter Brinkmann, Ruhr University
Room: 3

Wednesday, October 12, 2016 3:00PM - 3:15PM		NW4.00001: Measurement of a comprehensive plasma parameter set in low pressure H$_{\mathrm{2}}$ discharges for extended benchmarking of CR models Stefan Briefi, Ursel Fantz Preview Abstract
Wednesday, October 12, 2016 3:15PM - 3:30PM		NW4.00002: Non-invasive determination of kinetic ion quantities and plasma parameters throughout the plasma sheath and bulk Tsanko Vaskov Tsankov, Uwe Czarnetzki Preview Abstract
Wednesday, October 12, 2016 3:30PM - 3:45PM		NW4.00003: The correct kinetic Bohm criterion Uwe Czarnetzki, Tsanko Vaskov Tsankov Preview Abstract
(Author Not Attending)		NW4.00004: Reconsideration of basic concepts for the low-pressure discharge maintenance Antonia Shivarova Preview Abstract
Wednesday, October 12, 2016 4:00PM - 4:15PM		NW4.00005: Non-locality, adiabaticity, thermodynamics and electron energy probability functions. Roderick Boswell, Yunchao Zhang, Christine Charles, Kazunori Takahashi Preview Abstract
Wednesday, October 12, 2016 4:15PM - 4:30PM		NW4.00006: Effect of collisions on the two-stream instability in a finite length plasma Peter L.G. Ventzek, Dmytro Sydorenko, Igor D. Kaganovich Preview Abstract
Wednesday, October 12, 2016 4:30PM - 4:45PM		NW4.00007: Modeling of High-voltage Breakdown in Helium Liang Xu, Alexander Khrabrov, Igor Kaganovich, Timothy Sommerer Preview Abstract

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