Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session NW1: Laser-Based Diagnostics I
3:00 PM–5:00 PM,
Wednesday, October 12, 2016
Room: 1
Chair: Tsuyohito Ito, Osaka University
Abstract ID: BAPS.2016.GEC.NW1.7
Abstract: NW1.00007 : Real-time monitoring of reactive species in downstream etch reactor by VUV broad-band absorption spectroscopy.
4:45 PM–5:00 PM
Preview Abstract Abstract
Authors:
R. Soriano
(LTM, Univ. Grenoble & CNRS)
L. Vallier
(LTM, Univ. Grenoble & CNRS)
G. Cunge
(LTM, Univ. Grenoble & CNRS)
N. Sadeghi
(LTM, Univ. Grenoble & CNRS)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.NW1.7
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