Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session TR2: Magnetrons II
4:00 PM–5:15 PM,
Thursday, October 13, 2016
Room: 2a
Chair: Jon Gudmundsson, University of Iceland
Abstract ID: BAPS.2016.GEC.TR2.2
Abstract: TR2.00002 : Global model for active control of capacitive radio frequency magnetron discharges
4:15 PM–4:30 PM
Preview Abstract Abstract
Authors:
Dennis Engel
(Ruhr University Bochum, Germany)
Dennis Krueger
(Ruhr University Bochum, Germany)
Christian Woelfel
(Ruhr University Bochum, Germany)
Moritz Oberberg
(Ruhr University Bochum, Germany)
Jan Lunze
(Ruhr University Bochum, Germany)
Peter Awakowicz
(Ruhr University Bochum, Germany)
Ralf Peter Brinkmann
(Ruhr University Bochum, Germany)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.TR2.2
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