Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session TR2: Magnetrons II
4:00 PM–5:15 PM,
Thursday, October 13, 2016
Room: 2a
Chair: Jon Gudmundsson, University of Iceland
Abstract ID: BAPS.2016.GEC.TR2.1
Abstract: TR2.00001 : Simulation of the electric potential and plasma generation coupling in magnetron sputtering discharges*
4:00 PM–4:15 PM
Preview Abstract
Abstract
Authors:
Jan Trieschmann
(Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany)
Dennis Krueger
(Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany)
Frederik Schmidt
(Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany)
Ralf Peter Brinkmann
(Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany)
Thomas Mussenbrock
(Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany)
*This work is supported by the German Research Foundation (DFG) in the frame of the transregional collaborative research centre TRR 87.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.TR2.1
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