69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016;
Bochum, Germany
Session Index
Session SR2: Inductively Coupled Plasmas II
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Chair: Jean Paul Booth, Ecole Polytechnique
Room: 2a
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Thursday, October 13, 2016
2:00PM - 2:15PM
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SR2.00001: Simulating industrial plasma reactors - A fresh perspective
Sebastian Mohr, Sara Rahimi, Jonathan Tennyson, Oliver Ansell, Jash Patel
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Thursday, October 13, 2016
2:15PM - 2:30PM
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SR2.00002: A hybrid model of biased inductively coupled discharges$^{\mathrm{1}}$
Deqi Wen, Michael A Lieberman, Quanzhi Zhang, Yongxin Liu, Younian Wang
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Thursday, October 13, 2016
2:30PM - 2:45PM
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SR2.00003: Modeling of inductively coupled plasmas at low pressure conditions
Sotiris Mouchtouris, George Kokkoris
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Thursday, October 13, 2016
2:45PM - 3:00PM
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SR2.00004: Structure Control of Vertical Nanographene toward Electrochemical and Bio Applications
Mineo Hiramatsu, Hiroki Kondo, Masaru Hori
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Thursday, October 13, 2016
3:00PM - 3:15PM
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SR2.00005: Research on the mechanism of multiple inductively coupled plasma source for large area processing
JangJae Lee, SiJun Kim, DaeWoong Kim, KwangKi Kim, YoungSeok Lee, ShinJae You
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Thursday, October 13, 2016
3:15PM - 3:30PM
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SR2.00006: Synthesis of Silicon Nanoparticles in Inductively Coupled Plasmas
Aram H. Markosyan, Romain Le Picard, Steven L. Girshick, Mark J. Kushner
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