Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session JW2: Capacitively Coupled Plasmas II
8:30 AM–10:00 AM,
Wednesday, October 12, 2016
Room: 2a
Chair: Shahid Rauf, Applied Materials, Inc
Abstract ID: BAPS.2016.GEC.JW2.3
Abstract: JW2.00003 : Comparison of different methods for the measurements and calculations of Capacitively Coupled Plasmas electrical characteristics
9:15 AM–9:30 AM
Preview Abstract Abstract
Authors:
Giannis Tsigaras
(Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras)
Nikolaos Spiliopoulos
(Department of Physics - University of Patras)
Eleftherios Amanatides
(Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras)
Dimitrios Mataras
(Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras)
Collaboration:
Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.JW2.3
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