Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session JW2: Capacitively Coupled Plasmas II
8:30 AM–10:00 AM,
Wednesday, October 12, 2016
Room: 2a
Chair: Shahid Rauf, Applied Materials, Inc
Abstract ID: BAPS.2016.GEC.JW2.2
Abstract: JW2.00002 : Plasma Self-organization in Moderately High Pressure Capacitively Coupled RF Discharge.
9:00 AM–9:15 AM
Preview Abstract Abstract
Authors:
Anton Kobelev
(Applied Materials, Inc., Global Development Center, Russia)
Kallol Bera
(Applied Materials, Inc.)
John Forster
(Applied Materials, Inc.)
Alexander Smirnov
(Applied Materials, Inc., Global Development Center, Russia)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.JW2.2
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