Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session FT2: Inductively Coupled Plasmas I
2:00 PM–3:30 PM,
Tuesday, October 11, 2016
Room: 2a
Chair: Steven Shannon, North Carolina State University
Abstract ID: BAPS.2016.GEC.FT2.2
Abstract: FT2.00002 : Gas composition influence on ion energy distribution functions in an industrial ICP reactor with biased cathode.
2:15 PM–2:30 PM
Preview Abstract
Abstract
Authors:
David Peterson
(North Carolina State Univ)
Steven Shannon
(North Carolina State Univ)
David Coumou
(MKS Instruments RF Power Division)
Scott White
(MKS Instruments RF Power Division)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.FT2.2
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2023 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
1 Research Road, Ridge, NY 11961-2701
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700