69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016;
Bochum, Germany
Session Index
Session FT2: Inductively Coupled Plasmas I
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Chair: Steven Shannon, North Carolina State University
Room: 2a
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Tuesday, October 11, 2016
2:00PM - 2:15PM
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FT2.00001: Control of ion energy distributions in inductively coupled ratio-frequency plasmas with a biased electrode
Chan Xue, Wei Liu, Fei Gao, You-Nian Wang
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Tuesday, October 11, 2016
2:15PM - 2:30PM
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FT2.00002: Gas composition influence on ion energy distribution functions in an industrial ICP reactor with biased cathode.
David Peterson, Steven Shannon, David Coumou, Scott White
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Tuesday, October 11, 2016
2:30PM - 2:45PM
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FT2.00003: Studies on the radical species in inductively coupled Ar/CH4 plasma using improved single Langmuir probe diagnostic methods and fluid simulation
Ju-Hong Cha, Kwon-Sang Seo, Jung Yeol Lee, Hae June Lee, Ho-Jun Lee
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Tuesday, October 11, 2016
2:45PM - 3:00PM
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FT2.00004: An electromagnetic approach to a small-scale microwave ICP-plasmajet
Michael Klute, Horia-Eugen Porteanu, Wolfgang Heinrich, Peter Awakowicz, Ralf-Peter Brinkmann
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Tuesday, October 11, 2016
3:00PM - 3:15PM
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FT2.00005: Control of electron energy distribution by the power balance of the combined inductively and capacitively coupled RF plasmas
Jin Seok Kim, Ho-Jun Lee, Hae June Lee
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Tuesday, October 11, 2016
3:15PM - 3:30PM
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FT2.00006: Neutral and ion dynamics at the plasma-surface interface region in inductively coupled plasmas
Martin Blake, Andrew Robert Gibson, Kari Niemi, Deborah O'Connell, Timo Gans
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