Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session AM3: Pulsed High Power Plasmas for Synthesis of Nanostructured Thin Films
11:00 AM–4:45 PM,
Monday, October 10, 2016
Room: Room 3
Chair: Peter Awakowicz, Ruhr University
Abstract ID: BAPS.2016.GEC.AM3.8
Abstract: AM3.00008 : Localized traveling ionization zones and their importance for the high power impulse magnetron sputtering process*
3:15 PM–3:45 PM
Preview Abstract
Abstract
Author:
Christian Maszl
(Institute of Experimental Physics II, Ruhr-University Bochum)
*This project is supported by the DFG (German Science Foundation) within the framework of the Coordinated Research Center SFB-TR 87 and the Research Department ''Plasmas with Complex Interactions'' at Ruhr-University Bochum.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.AM3.8
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