69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016;
Bochum, Germany
Session Index
Session AM3: Pulsed High Power Plasmas for Synthesis of Nanostructured Thin Films
Focus Session
|
Show Abstracts |
Chair: Peter Awakowicz, Ruhr University
Room: Room 3
|
|
Monday, October 10, 2016
11:00AM - 11:30AM
|
|
AM3.00001: High Power Impulse Magnetron Sputtering - the Age of Adolescence
Invited Speaker:
Arutiun Ehiasarian
Preview Abstract |
Monday, October 10, 2016
11:30AM - 12:00PM
|
|
AM3.00002: Lessons from modelling DC reactive magnetron sputtering for HIPIMS users
Invited Speaker:
Diederik Depla
Preview Abstract |
Monday, October 10, 2016
12:00PM - 1:30PM
|
|
AM3.00003: Lunch Break
|
Monday, October 10, 2016
1:30PM - 2:00PM
|
|
AM3.00004: Synchronized metal-ion irradiation as a way to control growth of transition-metal nitride alloy films during hybrid HIPIMS/DCMS co-sputtering
Invited Speaker:
Grzegorz Greczynski
Preview Abstract |
Monday, October 10, 2016
2:00PM - 2:30PM
|
|
AM3.00005: Control of nanoscale atomic arrangement in multicomponent thin films by temporally modulated vapour fluxes
Invited Speaker:
Kostas Sarakinos
Preview Abstract |
Monday, October 10, 2016
2:30PM - 2:45PM
|
|
AM3.00006: Coffee Break
|
Monday, October 10, 2016
2:45PM - 3:15PM
|
|
AM3.00007: What can we learn about HiPIMS process from the multidimensional plasma modeling?
Invited Speaker:
Tiberiu Minea
Preview Abstract |
Monday, October 10, 2016
3:15PM - 3:45PM
|
|
AM3.00008: Localized traveling ionization zones and their importance for the high power impulse magnetron sputtering process
Invited Speaker:
Christian Maszl
Preview Abstract |
Monday, October 10, 2016
3:45PM - 4:15PM
|
|
AM3.00009: Visualizing the ground state particle dynamics in HiPIMS discharges
Invited Speaker:
Nikolay Britun
Preview Abstract |
Monday, October 10, 2016
4:15PM - 4:45PM
|
|
AM3.00010: Closing Remarks
Preview Abstract |
