Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session PR2: Capacitively Coupled Plasmas II
1:30 PM–2:45 PM,
Thursday, October 15, 2015
Room: 308 AB
Chair: Edmund Schuengel, West Virginia University
Abstract ID: BAPS.2015.GEC.PR2.5
Abstract: PR2.00005 : Generation of anomalously energetic suprathermal electrons by an electron beam interacting with a nonuniform plasma
2:30 PM–2:45 PM
Preview Abstract
Abstract
Authors:
Dmytro Sydorenko
(University of Alberta, Canada)
Igor D. Kaganovich
(Princeton University)
Peter L. Ventzek
(Tokyo Electron America)
Lee Chen
(Tokyo Electron America)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.PR2.5
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2023 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
1 Research Road, Ridge, NY 11961-2701
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700