68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015;
Honolulu, Hawaii
Session Index
Session PR2: Capacitively Coupled Plasmas II
|
Show Abstracts |
Chair: Edmund Schuengel, West Virginia University
Room: 308 AB
|
|
Thursday, October 15, 2015
1:30PM - 1:45PM
|
|
PR2.00001: The role of the singlet metastables in capacitively coupled oxygen discharges
Jon Tomas Gudmundsson, Michael A. Lieberman
Preview Abstract |
Thursday, October 15, 2015
1:45PM - 2:00PM
|
|
PR2.00002: Experimental observation of multi-layer excitation structure in capacitively coupled SF6 plasmas
Yong-Xin Liu, Fei Gao, Yuan-Hong Song, Xue-Chun Li, You-Nian Wang
Preview Abstract |
Thursday, October 15, 2015
2:00PM - 2:15PM
|
|
PR2.00003: ABSTRACT WITHDRAWN
Preview Abstract |
Thursday, October 15, 2015
2:15PM - 2:30PM
|
|
PR2.00004: Harmonic generation of microwave frequencies in plasmas
Premkumar PanneerChelvam, Laxminarayan L. Raja
Preview Abstract |
Thursday, October 15, 2015
2:30PM - 2:45PM
|
|
PR2.00005: Generation of anomalously energetic suprathermal electrons by an electron beam interacting with a nonuniform plasma
Dmytro Sydorenko, Igor D. Kaganovich, Peter L. Ventzek, Lee Chen
Preview Abstract |
