Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session GT1: Poster Session I (4:00pm - 6:00 pm)
4:00 PM,
Tuesday, October 13, 2015
Room: Exhibit Hall III
Abstract ID: BAPS.2015.GEC.GT1.140
Abstract: GT1.00140 : Preparation of hydrogenated diamond-like carbon films by reactive Ar/CH$_4$ high power impulse magnetron sputtering with negative pulse voltage*
Preview Abstract Abstract
Authors:
Takashi Kimura
(Nagoya Institute of Technology)
Hikaru Kamata
(Nagoya Institute of Technology)
*This work is partially supported by JSPS KAKENHI Grant Number 26420230.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.GT1.140
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