67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014;
Raleigh, North Carolina
Session Index
Session ET1: Plasma Diagnostics and Sources for Biological Applications
Chair: Toshiro Kaneko, Tohoku University
Room: State EF
Tuesday, November 4, 2014
1:30PM - 1:45PM
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ET1.00001: Multi-Modality Pulsed AC Source for Medical Applications of Non-Equilibrium Plasmas
Daniel Friedrichs, James Gilbert
Preview Abstract |
Tuesday, November 4, 2014
1:45PM - 2:00PM
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ET1.00002: Selective irradiation of radicals for biomedical treatment using vacuum ultraviolet light from an excimer lamp
Ryo Ono, Yusuke Tokumitsu, Shungo Zen, Seiya Yonemori
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Tuesday, November 4, 2014
2:00PM - 2:15PM
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ET1.00003: Diagnostic Challenges in Plasma Medicine
Stephan Reuter, Helena Tresp, Ansgar Schmidt-Bleker, Joern Winter, Sylvain Iseni, Mario D\"unnbier, Kai Masur, Annemarie Barton, Malte Hammer, Thomas von Woedtke, Klaus-Dieter Weltmann
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Tuesday, November 4, 2014
2:15PM - 2:30PM
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ET1.00004: Measurement of OH, NO, O and N atoms in helium plasma jet for ROS/RNS controlled biomedical processes
Seiya Yonemori, Taku Kamakura, Ryo Ono
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Tuesday, November 4, 2014
2:30PM - 2:45PM
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ET1.00005: Vacuum ultraviolet spectroscopic analysis of AC excited non-equilibrium atmospheric pressure Ar plasma jet
Keigo Takeda, Kenji Ishikawa, Hiromasa Tanaka, Hiroki Kondo, Makoto Sekine, Masaru Hori
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Tuesday, November 4, 2014
2:45PM - 3:00PM
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ET1.00006: Non thermal plasma jets interacting with targets and gas flows
Eric Robert, T. Darny, D. Ries, S. Dozias, J-M. Pouvesle
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Session ET2: Modeling of Plasma Etching
Chair: Douglas Keil, Lam Research
Room: State C
Tuesday, November 4, 2014
1:30PM - 1:45PM
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ET2.00001: Profile Control Using Pulsed Power During Plasma Etching in Capacitively Coupled Plasmas
Sang-Heon Song, Mark J. Kushner
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Tuesday, November 4, 2014
1:45PM - 2:00PM
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ET2.00002: Insights into Plasma Etch Profile Evolution with 3D Profile Simulation
Saravanapriyan Sriraman, Alex Paterson, Yiting Zhang, Mark Kushner
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Tuesday, November 4, 2014
2:00PM - 2:15PM
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ET2.00003: Multi Time-Step Feature Scale Simulations with FPS3D
Paul Moroz, Daniel Moroz
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Tuesday, November 4, 2014
2:15PM - 2:45PM
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ET2.00004: Modeling of plasma-induced damage during the etching of ultimately-scaled transistors in ULSI circuits---A model prediction of damage in three dimensional structures
Invited Speaker:
Koji Eriguchi
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Tuesday, November 4, 2014
2:45PM - 3:00PM
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ET2.00005: Molecular dynamics analysis of silicon chloride ion incidence during Si etching in Cl-based plasmas: Effects of ion incident energy, angle, and neutral radical-to-ion flux ratio
Nobuya Nakazaki, Koji Eriguchi, Kouichi Ono
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Session ET3: Dielectric Barrier Discharges and Corona
Chair: Anne Bourdon, Ecole Polytechnique
Room: State D
Tuesday, November 4, 2014
1:30PM - 2:00PM
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ET3.00001: Recent developments in large-scale ozone generation with dielectric barrier discharges
Invited Speaker:
Jose L. Lopez
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Tuesday, November 4, 2014
2:00PM - 2:15PM
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ET3.00002: Ferroelectric-driven atmospheric pressure discharges
Michael Johnson, David Go
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Tuesday, November 4, 2014
2:15PM - 2:30PM
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ET3.00003: Self-Organization in DBDs on a Single Pulse: Periodic Structures and Diffuse Discharges
Natalia Yu. Babaeva, Mark J. Kushner
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Tuesday, November 4, 2014
2:30PM - 2:45PM
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ET3.00004: Charge transfer in surface barrier discharge on $\mu$ sec to msec time scales
Sergey Leonov, Igor Adamovich, Vitaly Petrishchev
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