Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session PR2: Plasma Deposition and Nanoparticle Generation
1:30 PM–3:30 PM,
Thursday, November 6, 2014
Room: State C
Chair: Kazuo Takahashi, Kyoto Institute of Technology
Abstract ID: BAPS.2014.GEC.PR2.5
Abstract: PR2.00005 : Surface modification due to atmospheric pressure plasma treatment during film growth of silicon dioxide like and amorphous hydrogenated carbon material*
2:45 PM–3:00 PM
Preview Abstract
Abstract
Authors:
Katja Ruegner
(Ruhr-Uni Bochum, RD Plasmas with Complex Interactions)
Ruediger Reuter
(Ruhr-Uni Bochum, RD Plasmas with Complex Interactions)
Achim von Keudell
(Ruhr-Uni Bochum, RD Plasmas with Complex Interactions)
Jan Benedikt
(Ruhr-Uni Bochum, RD Plasmas with Complex Interactions)
*The project is supported by the German Research Foundation (DFG) in the research group FOR 1123.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.PR2.5
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