Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session PR2: Plasma Deposition and Nanoparticle Generation
1:30 PM–3:30 PM,
Thursday, November 6, 2014
Room: State C
Chair: Kazuo Takahashi, Kyoto Institute of Technology
Abstract ID: BAPS.2014.GEC.PR2.4
Abstract: PR2.00004 : Novel method of Ge crystalline thin film deposition on SiO2 by sputtering*
2:30 PM–2:45 PM
Preview Abstract
Abstract
Authors:
Masaharu Shiratani
(Kyushu University)
Daiki Ichida
(Kyushu University)
Hyunwoong Seo
(Kyushu University)
Naho Itagaki
(Kyushu University)
Kazunori Koga
(Kyushu University)
*Work supported by JSPS.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.PR2.4
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