Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session AM1: Advanced RF Systems for Plasma Control
8:00 AM–3:00 PM,
Monday, November 3, 2014
Room: State EF
Chair: David Coumou, MKS Instruments
Abstract ID: BAPS.2014.GEC.AM1.9
Abstract: AM1.00009 : Inductively Coupled Plasma Sources for Dry Etching and Annealing Processes
1:45 PM–2:30 PM
Preview Abstract
Abstract 
Author:
Tomohiro Okumura
(Panasonic)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.AM1.9
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