Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session AM1: Advanced RF Systems for Plasma Control
8:00 AM–3:00 PM,
Monday, November 3, 2014
Room: State EF
Chair: David Coumou, MKS Instruments
Abstract ID: BAPS.2014.GEC.AM1.5
Abstract: AM1.00005 : Control of Ion Energy Distributions Through the Phase Difference Between Multiple Frequencies in Capacitively
10:15 AM–11:00 AM
Preview Abstract
Abstract 
Author:
Yiting Zhang Mark J. Kushner
(University of Michigan)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.AM1.5
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