Bulletin of the American Physical Society

66th Annual Gaseous Electronics Conference

Volume 58, Number 8

Monday–Friday, September 30–October 4 2013; Princeton, New Jersey

Session Index

Session LW1: Plasma Etching

Chair: Vincent Donnelly, University of Houston
Room: Ballroom I

Wednesday, October 2, 2013 3:30PM - 4:00PM		LW1.00001: Challenges in the Plasma Etch Process Development in the sub-20nm Technology Nodes Invited Speaker: Kaushik Kumar Preview Abstract
Wednesday, October 2, 2013 4:00PM - 4:15PM		LW1.00002: Photo-assisted etching of silicon in halogen-containing plasmas Shyam Sridhar, Weiye Zhu, Lei Liu, Demetre Economou, Vincent Donnelly Preview Abstract
Wednesday, October 2, 2013 4:15PM - 4:30PM		LW1.00003: Effect of TCP Pulsing in Photon Induced Sub-threshold Etching of Si Juline Shoeb, Saravanapriyan Sriraman, Tom Kamp, Alex Paterson Preview Abstract
Wednesday, October 2, 2013 4:30PM - 4:45PM		LW1.00004: Vacuum ultraviolet photon fluxes in argon-containing inductively coupled plasmas S.B. Radovanov, H.M. Persing, S. Wang, C.L. Culver, J.B. Boffard, C.C. Lin, A.E. Wendt Preview Abstract
Wednesday, October 2, 2013 4:45PM - 5:00PM		LW1.00005: Reduction Mechanism of Surface Roughness on ArF-Photoresist Using C$_{5}$HF$_{7}$ Gas Plasma Yudai Miyawaki, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Azumi Ito, Hirokazu Matsumoto, Masaru Hori Preview Abstract
Wednesday, October 2, 2013 5:00PM - 5:15PM		LW1.00006: Molecular Dynamics Analysis of Surface Reaction Kinetics during Si Etching in Cl-based Plasmas: Effects of Etch By-Products Ion Incidence Nobuya Nakazaki, Yoshinori Takao, Koji Eriguchi, Kouichi Ono Preview Abstract
Wednesday, October 2, 2013 5:15PM - 5:30PM		LW1.00007: Simulation of microwave pulsing in a radial line slot antenna etch process reactor Rochan Upadhyay, Kiyotaka Ishibashi, Laxminarayan Raja Preview Abstract

Session LW2: Plasma Modelling I

Chair: Vladimir Kolobov, University of Alabama
Room: Ballroom II

Wednesday, October 2, 2013 3:30PM - 4:00PM		LW2.00001: Particle based discharge simulations: electron heating and electromagnetic effects Invited Speaker: Thomas Mussenbrock Preview Abstract
Wednesday, October 2, 2013 4:00PM - 4:15PM		LW2.00002: Fluid modeling of low-temperature plasma transport across a magnetic field R. Futtersack, G.J.M. Hagelaar, P. Tamain, A. Simonin Preview Abstract
Wednesday, October 2, 2013 4:15PM - 4:30PM		LW2.00003: An External Circuit Model for 3D Electromagnetic Particle-In-Cell Simulations Ming-Chieh Lin, Chuandong Zhou, David N. Smithe Preview Abstract
Wednesday, October 2, 2013 4:30PM - 4:45PM		LW2.00004: PumpKin: A tool to find principal pathways in plasma chemical models Aram H. Markosyan, Alejandro Luque, Francisco J. Gordillo V\'azquez, Ute Ebert Preview Abstract
Wednesday, October 2, 2013 4:45PM - 5:00PM		LW2.00005: Arbitrarily high-order semi-Lagrangian methods for the kinetic description of plasmas Yaman G\"{u}\c{c}l\"{u}, Andrew J. Christlieb, William N.G. Hitchon Preview Abstract
Wednesday, October 2, 2013 5:00PM - 5:15PM		LW2.00006: A hybrid model to estimate particle fluxes in a fluid mode using a particle-in-cell Monte Carlo collision method Seok Won Hwang, Ho-Jun Lee, Hae June Lee Preview Abstract
Wednesday, October 2, 2013 5:15PM - 5:30PM		LW2.00007: Automatic Coarsening of the Particle Interaction Mesh in a Hybrid PIC-DSMC Simulation Stan Moore, Paul Crozier, Chris Moore, Matthew Bettencourt, Matthew Hopkins Preview Abstract

Session LW3: Biomedical Applications I

Chair: Alexander Fridman, Drexel University
Room: Nassau Room

Wednesday, October 2, 2013 3:30PM - 4:00PM		LW3.00001: Physics and medical applications of cold atmospheric plasma Invited Speaker: Michael Keidar Preview Abstract
Wednesday, October 2, 2013 4:00PM - 4:15PM		LW3.00002: Gene Transfection Method Using Atmospheric Pressure Dielectric-Barrier Discharge Plasmas Shota Sasaki, Makoto Kanzaki, Toshiro Kaneko Preview Abstract
Wednesday, October 2, 2013 4:15PM - 4:30PM		LW3.00003: Plasma-activated medium induced apoptosis on tumor cells Masaru Hori, Hiromasa Tanaka, Masaaki Mizuno, Kae Nakamura, Hiroaki Kajiyama, Keigo Takeda, Kenji Ishikawa, Hiroyuki Kano, Fumitaka Kikkawa Preview Abstract
Wednesday, October 2, 2013 4:30PM - 4:45PM		LW3.00004: DNA damage in oral cancer cells induced by nitrogen atmospheric pressure plasma jets Xu Han, Matej Klas, Yueying Liu, M. Sharon Stack, Sylwia Ptasinska Preview Abstract
Wednesday, October 2, 2013 4:45PM - 5:00PM		LW3.00005: APNTP Inactivation of MS2 Bacteriophage: Effect of operating parameters on virucidal activity Nid'a Alshraiedeh, Mahmoud Alkawareek, Sean Gorman, William Graham, Brendan Gilmore Preview Abstract
Wednesday, October 2, 2013 5:00PM - 5:15PM		LW3.00006: Influence of Uniform and Non-Uniform Regimes of Nanosecond-Pulsed Dielectric Barrier Discharges on Intracellular Biochemical Processes in 10T1/2 Cells Abraham Lin, Natalie Shainsky, Daynna Park, Theresa Freeman, Danil Dobrynin, Alexander Fridman, Vandana Miller, Gregory Fridman Preview Abstract
Wednesday, October 2, 2013 5:15PM - 5:30PM		LW3.00007: Growth control of budding yeast cells by oxygen-radical treatment Takayuki Ohta, Hiroshi Hashizume, Masafumi Ito, Keigo Takeda, Masaru Hori Preview Abstract

Session LW5: Heavy-Particle Collisions

Chair: Tom Kirchner, York University
Room: Village Square

Wednesday, October 2, 2013 3:30PM - 4:00PM		LW5.00001: Heavy particle collisions in astrophysical, fusion, and other plasmas Invited Speaker: David Schultz Preview Abstract
Wednesday, October 2, 2013 4:00PM - 4:15PM		LW5.00002: Student Award Finalist - Interference in Recoil-Ion Momentum Spectra for ionization in p $+$ H$_{2}$ Collisions Sachin Sharma, Thusitha Arthanayaka, Ahmad Hasan, Basu Lamichhane, Juan Remolina, Alyson Smith, Michael Schulz Preview Abstract
Wednesday, October 2, 2013 4:15PM - 4:30PM		LW5.00003: Manipulating state-selective charge exchange in laser-assisted collisions of He$^{2+}$ with atomic H F. Javier Dom\'Inguez-Guti\'errez, R. Cabrera-Trujillo Preview Abstract
Wednesday, October 2, 2013 4:30PM - 5:00PM		LW5.00004: Antiproton-Impact Single and Double Ionization of He and H$_2$ Invited Speaker: Michael S. Pindzola Preview Abstract
Wednesday, October 2, 2013 5:00PM - 5:15PM		LW5.00005: Student Awards Finalist - Time-dependent convergent close-coupling approach to antiproton-impact ionization of molecular hydrogen A.S. Kadyrov, I.B. Abdurakhmanov, D.V. Fursa, I. Bray Preview Abstract
Wednesday, October 2, 2013 5:15PM - 5:30PM		LW5.00006: ABSTRACT WITHDRAWN Preview Abstract

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