Bulletin of the American Physical Society
65th Annual Gaseous Electronics Conference
Volume 57, Number 8
Monday–Friday, October 22–26, 2012; Austin, Texas
Session DT2: Low Pressure Plasma Sources
10:00 AM–12:00 PM,
Tuesday, October 23, 2012
Room: Classroom 203
Chair: Prashanth Kothnur, Applied Materials, Inc.
Abstract ID: BAPS.2012.GEC.DT2.5
Abstract: DT2.00005 : A first step toward the modeling of instabilities in high power pulse magnetron sputtering plasmas*
11:00 AM–11:15 AM
Preview Abstract Abstract
Authors:
Sara Gallian
(Ruhr University Bochum)
Denis Eremin
(Ruhr University Bochum)
Torben Hemke
(Ruhr University Bochum)
Thomas Mussenbrock
(Ruhr University Bochum)
Ralf Peter Brinkmann
(Ruhr University Bochum)
William N.G. Hitchon
(University of Wisconsin Madison)
*The authors gratefully acknowledge funding by the Deutsche Forschungsgemeinschaft within the frame of SFB-TR 87.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2012.GEC.DT2.5
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700