65th Annual Gaseous Electronics Conference
Volume 57, Number 8
Monday–Friday, October 22–26, 2012;
Austin, Texas
Session Index
Session DT2: Low Pressure Plasma Sources
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Show Abstracts |
Chair: Prashanth Kothnur, Applied Materials, Inc.
Room: Classroom 203
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Tuesday, October 23, 2012
10:00AM - 10:15AM
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DT2.00001: Two-Dimensional Electron and Metastable Density Profiles Produced in Helium Fast Ionization Wave Discharges
Brandon Weatherford, Edward Barnat, Zhongmin Xiong, Mark Kushner
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Tuesday, October 23, 2012
10:15AM - 10:30AM
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DT2.00002: A Plasma Based OES-CRDS Dual-mode Portable Spectrometer for Trace Element Detection: Emission and Ringdown Measurements of Mercury
Peeyush Sahay, Susan Scherrer, Chuji Wang
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Tuesday, October 23, 2012
10:30AM - 10:45AM
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DT2.00003: Relaxation of High Power Microwave Surface Plasma
Sterling Beeson, Andreas Neuber
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Tuesday, October 23, 2012
10:45AM - 11:00AM
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DT2.00004: Fundamental TE$_{11}$ Mode and Plasma Interaction in a Cylindrical Waveguide
Sanjay K. Tomar, Hitendra K. Malik
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Tuesday, October 23, 2012
11:00AM - 11:15AM
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DT2.00005: A first step toward the modeling of instabilities in high power pulse magnetron sputtering plasmas
Sara Gallian, Denis Eremin, Torben Hemke, Thomas Mussenbrock, Ralf Peter Brinkmann, William N.G. Hitchon
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Tuesday, October 23, 2012
11:15AM - 11:30AM
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DT2.00006: MAGPIE: A new linear plasma device for studying fusion relevant plasma-surface interactions
Cormac Corr, Cameron Samuell, Boyd Blackwell, John Howard, Juan Caneses, Romana Lester
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Tuesday, October 23, 2012
11:30AM - 11:45AM
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DT2.00007: Two-Dimensional Particle-in-Cell Simulation of Cylindrical Magnetron Sputters for the Improvement of Target Utilization
Min Young Hur, Hyowon Bae, In Cheol Song, Ho-Jun Lee, Hae June Lee
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Tuesday, October 23, 2012
11:45AM - 12:00PM
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DT2.00008: Simulations of magnetically enhanced capacitively coupled plasma discharges using CFD-ACE+
Ananth Bhoj, Mustafa Megahed, Vladimir Kudriavtsev
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