64th Annual Gaseous Electronics Conference
Volume 56, Number 15
Monday–Friday, November 14–18, 2011;
Salt Lake City, Utah
Session Index
Session PR1: Plasma Chemistry
Chair: Jan Benedikt, Ruhr University Bochum
Room: 255D
Thursday, November 17, 2011
2:00PM - 2:30PM
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PR1.00001: Correlating Gas-Phase Energetics of Plasma Radicals with Surface Interaction Data
Invited Speaker:
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Thursday, November 17, 2011
2:30PM - 2:45PM
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PR1.00002: Chemical kinetics of radio-frequency driven atmospheric-pressure helium-oxygen plasmas in humid air
Tomoyuki Murakami, Kari Niemi, Timo Gans, Deborah O'Connell, William Graham
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Thursday, November 17, 2011
2:45PM - 3:00PM
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PR1.00003: Measurement of OH density and mixture ratio of ambient air in atmospheric pressure helium plasma jet using laser induced fluorescence
Seiya Yonemori, Nakagawa Yusuke, Ryo Ono, Tetsuji Oda
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Thursday, November 17, 2011
3:00PM - 3:15PM
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PR1.00004: Effect of vibrationally excited molecules on the production of O radicals in a pulsed streamer discharge
Atsushi Komuro, Ryo Ono, Tetsuji Oda
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Thursday, November 17, 2011
3:15PM - 3:30PM
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PR1.00005: ABSTRACT WITHDRAWN
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Session PR2: Collision Processes in Plasmas
Chair: Allan Stauffer, York University
Room: 255E
Thursday, November 17, 2011
2:00PM - 2:30PM
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PR2.00001: Electron attachment to radicals and other reactive molecules
Invited Speaker:
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Thursday, November 17, 2011
2:30PM - 2:45PM
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PR2.00002: Collisional Radiative Recombination Ar$^{+}$ + e + e at low temperatures from 77K to 180 K
R. Johnsen, T. Kotrik, P. Dohnal, R. Plasil, S. Roucka, P. Jusko, J. Glosik
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Thursday, November 17, 2011
2:45PM - 3:00PM
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PR2.00003: Low pressure hydrogen discharges diluted with argon explored using a global (volume averaged) model
Jon Tomas Gudmundsson, Aron Th. Hjartarson, Eythor G. Thorsteinsson
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Thursday, November 17, 2011
3:00PM - 3:15PM
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PR2.00004: Passage of energetic radiation through air: collisional kinetics of photons and electron production
Y.S. Dimant, G.S. Nusinovich, P. Sprangle, V.L. Granastein
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Thursday, November 17, 2011
3:15PM - 3:30PM
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PR2.00005: Anisotropy of H$\alpha $ Lines in Low Current Discharges in H$_{2}$ Discharges at High E/N
Vladimir Stojanovic, Zeljka Nikitovic, Zoran Petrovic
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Session PR3: Plasma-surface Interactions
Chair: Peter Ventzek, Tokyo Electron Ltd.
Room: 255F
Thursday, November 17, 2011
2:00PM - 2:15PM
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PR3.00001: Pore Sealing vs. Surface Densification in Inhibition of O$_{2}$ Plasma Damage in Organosilicates
Jeffry Kelber, Swayambhu Behera
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Thursday, November 17, 2011
2:15PM - 2:30PM
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PR3.00002: Simulation of the dynamics of a helium discharge in a thin dielectric tube at atmospheric pressure
Jaroslav Jansky, Francois Pechereau, Anne Bourdon
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Thursday, November 17, 2011
2:30PM - 2:45PM
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PR3.00003: 3D feature profile simulation based on realistic surface kinetic modeling of fluorocarbon plasma etch process
Won-Seok Chang, Deuk-Chul Kwon, Dong-Hun Yu, Deog-Gyun Cho, Yeong-Geun Yook, Jin-Tae Kim, Jung-Sik Yoon, Yeon-Ho Im
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Thursday, November 17, 2011
2:45PM - 3:00PM
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PR3.00004: Optical Emission Spectroscopy Characterization of Atmospheric Pressure Plasma Removal of High Density Polyethylene
Anthony McWilliams, Steven Shannon, Stephen Hudak, Jerry Cuomo
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Thursday, November 17, 2011
3:00PM - 3:15PM
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PR3.00005: Surface Modification of PAN-based Carbon Fiber Using Single and Dual High Frequency RF-PECVD
Demiral Akbar, Ummugul E. Gungor, Sinan Bilikmen
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