Bulletin of the American Physical Society

64th Annual Gaseous Electronics Conference

Volume 56, Number 15

Monday–Friday, November 14–18, 2011; Salt Lake City, Utah

Session Index

Session HW1: GEC Foundation Talk: Plasma Etching - The Challenges Ahead in Enabling Nanoelectronics

Chair: Mark Kushner, University of Michigan
Room: Ballroom AD

Wednesday, November 16, 2011
8:00AM - 9:00AM

HW1.00001: Plasma Etching - The Challenges Ahead in Enabling Nanoelectronics
Invited Speaker:

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Bulletin of the American Physical Society

64th Annual Gaseous Electronics Conference

Volume 56, Number 15

Monday–Friday, November 14–18, 2011; Salt Lake City, Utah

Session Index

Session HW1: GEC Foundation Talk: Plasma Etching - The Challenges Ahead in Enabling Nanoelectronics

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