Session SF1: Non-Equilibrium Kinetics

Application of Nonlocal Electron Kinetics to Plasma Technologies

Partially ionized plasmas are typically in a highly non-equilibrium thermodynamic state: the electrons are not in equilibrium with the neutral particle species or the ions, and the electrons are also not in equilibrium within their own ensemble, which results in a significant departure of the electron velocity distribution function (EVDF) from a Maxwellian. These non-equilibrium conditions provide considerable freedom to choose optimal plasma parameters for applications, which make gas-discharge plasmas remarkable tools for a variety of plasma applications, including plasma processing, discharge lighting, plasma propulsion, particle beam sources, and nanotechnology. Significant progress in understanding the formation of non-Maxwellian EVDF in the self-consistent electric fields has been one of the major achievements in the low-temperature plasmas during the last decade. This progress was made possible by a synergy between full-scale particle-in-cell simulations, analytical models, and experiments. Specific examples include rf discharges, dc discharges with auxiliary electrodes, Hall thruster discharges. In each example, nonlocal kinetic effects are identified as the main mechanisms responsible for the surprising degree of discharge self-organization. These phenomena include: explosive generation of cold electrons with rf power increase in low-pressure rf discharges; abrupt changes in discharge structure with increased bias voltage on a third electrode in a dc discharge with hot cathode; absence of a steady-state regime in Hall thruster discharges with intense secondary electron emission due to coupling of the sheath properties and the EVDF.   

Electron heating and the Electrical Asymmetry Effect in capacitively coupled RF discharges

For applications of capacitive radio frequency discharges, the control of particle distribution functions at the substrate surface is essential. Their spatio-temporal shape is the result of complex heating mechanisms of the respective species. Enhanced process control, therefore, requires a detailed understanding of the heating dynamics. There are two known modes of discharge operation: $\alpha $- and $\gamma $-mode. In $\alpha $-mode, most ionization is caused by electron beams generated by the expanding sheaths and field reversals during sheath collapse, while in $\gamma $-mode secondary electrons dominate the ionisation. In strongly electronegative discharges, a third heating mode is observed. Due to the low electron density in the discharge center the bulk conductivity is reduced and a high electric field is generated to drive the RF current through the discharge center. In this field, electrons are accelerated and cause significant ionisation in the bulk. This bulk heating mode is observed experimentally and by PIC simulations in CF$_{4}$ discharges. The electron dynamics and mode transitions as a function of driving voltage and pressure are discussed. Based on a detailed understanding of the heating dynamics, the concept of separate control of the ion mean energy and flux in classical dual-frequency discharges is demonstrated to fail under process relevant conditions. To overcome these limitations of process control, the Electrical Asymmetry Effect (EAE) is proposed in discharges driven at multiple consecutive harmonics with adjustable phase shifts between the driving frequencies. Its concept and a recipe to optimize the driving voltage waveform are introduced. The functionality of the EAE in different gases and first applications to large area solar cell manufacturing are discussed. Finally, limitations caused by the bulk heating in strongly electronegative discharges are outlined.