Hybrid Fluid-Analytical Simulations of E to H Instability in Electronegative Discharges*

The E to H instability in inductively driven electronegative plasmas has been previously observed experimentally [1] and explored theoretically [2]. A hybrid fluid-analytical code [3], which solves for both the inductive and capacitive coupling of the source coils to the plasma, is used to simulate a Cl$_2$ inductive reactor. Improvements were made to the code to allow simulations of highly electronegative gases. As the rf input current to the coils rises, the plasma transitions from a capacitive to an inductive mode. For a narrow range of input currents, the E to H transition is abrupt, exhibiting oscillations in electron, ion and neutral densities, electron temperature, power, etc.\\[4pt] [1] A.M. Marakhtanov, M. Tuszewski, M.A. Lieberman, A.J. Lichtenberg, J. Vac. Sci. Technol. A 21 (2003) 1849.\\[0pt] [2] P. Chabert, A.J. Lichtenberg, M.A. Lieberman, A.M. Marakhtanov, J. Appl. Phys. 94 (2003) 831.\\[0pt] [3] E. Kawamura, D.B. Graves, M.A. Lieberman, Plasma Sources Sci. Technol. 20 (2011) 035009.