Bulletin of the American Physical Society

64th Annual Gaseous Electronics Conference

Volume 56, Number 15

Monday–Friday, November 14–18, 2011; Salt Lake City, Utah

Session Index

Session JW1: RF and Microwave-Driven Plasmas	Show Abstracts
Chair: Masaaru Shiratani, Kyushu University Room: 255D

Wednesday, November 16, 2011 9:30AM - 9:45AM		JW1.00001: Simulation study of collisionless heating in single-frequency capacitively coupled discharges Sarveshwar Sharma, Miles Turner Preview Abstract
Wednesday, November 16, 2011 9:45AM - 10:00AM		JW1.00002: Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas Yu-Ru Zhang, Xiang Xu, Annemie Bogaerts, You-Nian Wang Preview Abstract
Wednesday, November 16, 2011 10:00AM - 10:15AM		JW1.00003: Electron Heating and Plasma Generation at Electrode Edge - Fluid and Kinetic Modeling Shahid Rauf, Ankur Agarwal, Kenneth Collins Preview Abstract
Wednesday, November 16, 2011 10:15AM - 10:30AM		JW1.00004: Experimental characterization of dual-frequency capacitively coupled plasmas Yong-Xin Liu, Xiao-song Li, Wen-Qi Lu, Yong-Nian Wang Preview Abstract
Wednesday, November 16, 2011 10:30AM - 10:45AM		JW1.00005: STUDENT AWARD FINALIST: Role of additional inductive power on the electron energy distribution in Ar/O2 capacitively coupled plasma Hyo-Chang Lee, Min-Hyong Lee, Chin-Wook Chung Preview Abstract
Wednesday, November 16, 2011 10:45AM - 11:00AM		JW1.00006: RF capacitively coupled plasma with multi-hole multi electrode Hun Su Lee, Yun Seong Lee, Sang Hun Seo, Hong Young Chang Preview Abstract
Wednesday, November 16, 2011 11:00AM - 11:15AM		JW1.00007: The Interaction of the Capacitive and Inductive Coupling Mechanisms with RF Substrate Bias Shuxia Zhao, Fei Gao, Ming Mao, Younian Wang, Annemie Bogaerts Preview Abstract
Wednesday, November 16, 2011 11:15AM - 11:30AM		JW1.00008: Atomic chlorine and electron densities in inductively-coupled plasmas in pure Cl2 : Comparison of numerical simulations with experiments Pascal Chabert, Nishant Sirse, Yasmina Azamoum, Jean-Paul Booth Preview Abstract
Wednesday, November 16, 2011 11:30AM - 11:45AM		JW1.00009: Influence of capacitive bias on electron dynamics in an inductively coupled plasma Mujahid Zaka-ul-Islam, Timo Gans, William Graham, Kari niemi, Deborah O'Connell Preview Abstract
Wednesday, November 16, 2011 11:45AM - 12:00PM		JW1.00010: UV Radiation from Hydrogen Containing Microwave Plasmas E. Felizardo, E. Tatarova, J. Henriques, F.M. Dias, C.M. Ferreira, B. Gordiets Preview Abstract

About APS

The American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics.

Headquarters 1 Physics Ellipse, College Park, MD 20740-3844 (301) 209-3200
Editorial Office 100 Motor Pkwy, Suite 110, Hauppauge, NY 11788 (631) 591-4000
Office of Public Affairs 529 14th St NW, Suite 1050, Washington, D.C. 20045-2001 (202) 662-8700

Bulletin of the American Physical Society

64th Annual Gaseous Electronics Conference

Volume 56, Number 15

Monday–Friday, November 14–18, 2011; Salt Lake City, Utah

Session Index

Session JW1: RF and Microwave-Driven Plasmas

Follow Us

Engage

My APS

Information for

About APS