64th Annual Gaseous Electronics Conference
Volume 56, Number 15
Monday–Friday, November 14–18, 2011;
Salt Lake City, Utah
Session Index
Session ET1: Plasma Deposition
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Show Abstracts |
Chair: Jeon Han, Sungkyunwkan University
Room: 255D
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Tuesday, November 15, 2011
2:00PM - 2:15PM
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ET1.00001: Deposition profile control of carbon films on trenched substrate by simultaneous plasma CVD and plasma etching
Masaharu Shiratani, Tatsuya Urakawa, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Giichiro Uchida, Kazunori Koga, Yuichi Setsuhara, Makoto Sekine, Masaru Hori
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Tuesday, November 15, 2011
2:15PM - 2:30PM
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ET1.00002: Using plasmas to control the nucleation, morphology and properties of self-organized graphene nanosheets
Shailesh Kumar, Dong Han Seo, Kostya (Ken) Ostrikov
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Tuesday, November 15, 2011
2:30PM - 2:45PM
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ET1.00003: Atmospheric pressure cold plasma treatment of cellulose based fillers for wood plastic composites
William Lekobou, Karl Englund, Patrick Pedrow, Louis Scudiero
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Tuesday, November 15, 2011
2:45PM - 3:00PM
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ET1.00004: Behavior of radicals in SiH$_4$/H$_2$ plasma for fabrication of solar cell using silicon thin film
Yusuke Abe, Atsushi Fukushima, Ya Lu, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Masaru Hori
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Tuesday, November 15, 2011
3:00PM - 3:15PM
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ET1.00005: Electrical investigation of the effect of gas additives on silicon deposition plasmas
M. Sobolewski, R. Ridgeway, M. Bitner, P. Hurley, D. Sinatore
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Tuesday, November 15, 2011
3:15PM - 3:30PM
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ET1.00006: On Generation and Propagation of the Plasma Ion Beam for Plasma Ion Assisted Deposition (PIAD) of Optical Coatings
J. Harhausen, R.P. Brinkmann, R. Foest, A. Ohl, B. Schr\"oder
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