Bulletin of the American Physical Society
64th Annual Gaseous Electronics Conference
Volume 56, Number 15
Monday–Friday, November 14–18, 2011; Salt Lake City, Utah
Session DT3: Microdischarges I
9:30 AM–12:30 PM,
Tuesday, November 15, 2011
Room: 255F
Chair: Pascal Chabert, Ecole Polytechnique
Abstract ID: BAPS.2011.GEC.DT3.6
Abstract: DT3.00006 : Low-Pressure Microwave Excited Microplasmas as Sources of VUV Photons and Metastable Excited Atoms: Modeling*
10:45 AM–11:00 AM
Preview Abstract
Abstract
Authors:
Mark Kushner
(University of Michigan)
James Cooley
(Agilent Technologies)
Jun Xue
(Agilent Technologies)
Randall Urdhal
(Agilent Technologies)
*Work supported by Agilent Technologies.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2011.GEC.DT3.6
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