Bulletin of the American Physical Society

63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas

Volume 55, Number 7

Monday–Friday, October 4–8, 2010; Paris, France

Session Index

Session FT: Special Evening Session

Chair: Makoto Sekine, Nagoya University
Room: 151

Tuesday, October 5, 2010 8:00PM - 8:35PM		FT.00001: Plasma Processing for Nanoelectronics --- History and Prospects Invited Speaker: Preview Abstract
Tuesday, October 5, 2010 8:35PM - 9:00PM		FT.00002: Ion Molecule Collision Processes in Gaseous Electronics Invited Speaker: Preview Abstract
Tuesday, October 5, 2010 9:00PM - 9:20PM		FT.00003: Current Issues for next generation large area and high rate plasma process for thin film deposition Invited Speaker: Preview Abstract
Tuesday, October 5, 2010 9:20PM - 9:30PM		FT.00004: Academic Roadmap of Plasma Process Technologies Invited Speaker: Preview Abstract
Tuesday, October 5, 2010 9:30PM - 10:00PM		FT.00005: Discussion Preview Abstract

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Bulletin of the American Physical Society

63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas

Volume 55, Number 7

Monday–Friday, October 4–8, 2010; Paris, France

Session Index

Session FT: Special Evening Session

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