Bulletin of the American Physical Society

63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas

Volume 55, Number 7

Monday–Friday, October 4–8, 2010; Paris, France

Session Index

Session BT1: Plasma Etching I

Chair: Makoto Sekine, Nagoya University
Room: 162

Tuesday, October 5, 2010 8:30AM - 9:00AM		BT1.00001: Synchronized pulsed plasmas: potential process improvements for patterning technologies Invited Speaker: Preview Abstract
Tuesday, October 5, 2010 9:00AM - 9:15AM		BT1.00002: Synchronous Plasma Pulsing for Etch Applications M. Haass, M. Darnon, E. Pargon, S. Banna, O. Joubert Preview Abstract
Tuesday, October 5, 2010 9:15AM - 9:30AM		BT1.00003: The Etch Step in MEMS Deep Silicon Etch Iqbal Saraf, Matthew Goeckner, Lawrence Overzet Preview Abstract
Tuesday, October 5, 2010 9:30AM - 9:45AM		BT1.00004: Dual-RF-Mode Inductively Coupled Plasma (ICP) Source for Advanced Dry Etching Processes Samer Banna, Ankur Agarwal, Valentin Todorow, Shahid Rauf, Ken Collins Preview Abstract
Tuesday, October 5, 2010 9:45AM - 10:00AM		BT1.00005: Analysis of gallium nitride (GaN) surface interacted with chlorine etching plasma beams Shang Chen, Ryosuke Kometani, Kenji Ishikawa, Hiroki Kondo, Keigo Takeda, Hiroki Kano, Yutaka Tokuda, Makoto Sekine, Masaru Hori Preview Abstract
Tuesday, October 5, 2010 10:00AM - 10:15AM		BT1.00006: Deep Gallium Nitride Etching Julien Ladroue, Mohamed Boufnichel, Thomas Tillocher, Philippe Lefaucheux, Pierre Ranson, R\'emi Dussart Preview Abstract
Tuesday, October 5, 2010 10:15AM - 10:30AM		BT1.00007: Anisotropic Cl$_{2}$-based ICP etching of III-Vs with the addition of Si-containing gases L. Gatilova, S. Bouchoule, G. Patriarche, S. Guilet Preview Abstract

Session BT2: Plasma Surface Interactions I

Chair: Larry Overzet, University of Texas at Dallas
Room: 151

Tuesday, October 5, 2010 8:30AM - 9:00AM		BT2.00001: Nanotextured polymers by plasma etching: defining chemistry and topography for superior wetting and optics Invited Speaker: Preview Abstract
Tuesday, October 5, 2010 9:00AM - 9:15AM		BT2.00002: Study of the modifications induced by plasma VUV light on photoresist polymers for the development of plasma cure treatments Marc Fouchier, Erwine Pargon, Laurent Azarnouche, Olivier Luere, Kevin Menguelti, Gilles Cunge, Nader Sadeghi Preview Abstract
Tuesday, October 5, 2010 9:15AM - 9:30AM		BT2.00003: In-line plasma cleaning of EUV multilayer mirrors Evdokim Malykhin, Oleg Braginsky, Alexander Kovalev, Dmitry Lopaev, Alexander Rakhimov, Tatyana Rakhimova, Anna Vasilieva, Sergey Zyryanov, Konstantin Koshelev, Vladimir Krivtsun, Oleg Yakushev Preview Abstract
Tuesday, October 5, 2010 9:30AM - 9:45AM		BT2.00004: Infrared spectroscopic study on oxidation of carbon for environmental solution Taka-aki Kawakami, Masanori Shinohara, Kojiro Hara, Yoshinobu Matsuda, Hiroshi Fujiyama, Yuki Nitta, Tatsuyuki Nakatani Preview Abstract
Tuesday, October 5, 2010 9:45AM - 10:00AM		BT2.00005: Hydrogen/Argon Plasma-Amorphous Carbon Near-Surface Interactions N. Ning, D.B. Graves, N. Fox-Lyon, G.S. Oehrlein Preview Abstract
Tuesday, October 5, 2010 10:00AM - 10:15AM		BT2.00006: Studies of Asperity-Scale Plasma Discharge Phenomena Javan Albright, Laxminarayan Raja, Matthew Manley, K. Ravi-Chandar, Sikhanda Satapathy Preview Abstract
Tuesday, October 5, 2010 10:15AM - 10:30AM		BT2.00007: Plasma VUV intensity as a function of its electron energy distribution Lee Chen, Jianping Zhao, Ron Bravenec, Merritt Funk, Radha Sundararajan, Koji Koyama, Toshihisa Nozawa, Seji Samukawa Preview Abstract

Session BT3: Modeling and Simulation I

Chair: Mark Kushner, University of Michigan
Room: 262

Tuesday, October 5, 2010 8:30AM - 9:00AM		BT3.00001: The effect of neutral-gas depletion on the plasma density and momentum Invited Speaker: Preview Abstract
Tuesday, October 5, 2010 9:00AM - 9:15AM		BT3.00002: Adaptive Mesh Refinement for Plasma Simulations Vladimir Kolobov, Robert Arslanbekov Preview Abstract
Tuesday, October 5, 2010 9:15AM - 9:30AM		BT3.00003: Simulation of the propagation of an air plasma discharge at atmospheric pressure in a capillary glass tube : influence of the confinement on the discharge reactivity Jaroslav Jansky, Fabien Tholin, Zdenek Bonaventura, Anne Bourdon Preview Abstract
Tuesday, October 5, 2010 9:30AM - 9:45AM		BT3.00004: Negative corona current pulse modelling in air at atmospheric pressure Delphine Bessi\`eres, Jean Paillol Preview Abstract
Tuesday, October 5, 2010 9:45AM - 10:00AM		BT3.00005: About positive streamer corona inception near a curved electrode Sergey Pancheshnyi Preview Abstract
Tuesday, October 5, 2010 10:00AM - 10:15AM		BT3.00006: The electro-negative character of He/O$_{2}$ cold atmospheric pressure plasmas Jochen Waskoenig, Timo Gans Preview Abstract
Tuesday, October 5, 2010 10:15AM - 10:30AM		BT3.00007: Liquid Droplets in Atmospheric Pressure Plasmas Muhammad Iqbal, Miles Turner Preview Abstract

Session BT4: Biological and Biomedical Applications of Plasmas I

Chair: Uros Cvelbar, Academic and Research Network of Slovenia
Room: Petit Amphitheatre

Tuesday, October 5, 2010 8:30AM - 9:00AM		BT4.00001: Low energy electron collisions of relevance to biological radiation damage Invited Speaker: Preview Abstract
Tuesday, October 5, 2010 9:00AM - 9:30AM		BT4.00002: Plasma Biomedicine: Modelings and Experiments on Cancer Treatment, Tooth Bleaching, and Decontamination Invited Speaker: Preview Abstract
Tuesday, October 5, 2010 9:30AM - 9:45AM		BT4.00003: Hollow Optical Fiber-Based Microplasma for Single Cell-Level Cancer Therapy Jae Young Kim, John Ballato, Paul Foy, Thomas Hawkins, Yanzhang Wei, Jinhua Li, Sung-O Kim Preview Abstract
Tuesday, October 5, 2010 9:45AM - 10:00AM		BT4.00004: Control of ROS and RNS in air surface micro-discharge for antisepsis and sterilization Yukinori Sakiyama, Tetsuji Shimizu, David Graves, Gregor Morfill Preview Abstract
Tuesday, October 5, 2010 10:00AM - 10:15AM		BT4.00005: Pulsed spark discharge plasma characterization and its biological applications Danil Dobrynin, Andrey Starikovskiy, Gary Friedman, Alexander Fridman Preview Abstract
Tuesday, October 5, 2010 10:15AM - 10:30AM		BT4.00006: Prospects of dielectric barrier discharge (DBD) in medical application: Investigation through plasma characterization P. Rajasekaran, P. Mertmann, N. Bibinov, P. Awakowicz, D. Wandke, W. Vioel Preview Abstract

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