Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session UF3: Plasma Boundaries and Sheaths
2:00 PM–3:30 PM,
Friday, October 8, 2010
Room: 162
Chair: Julian Schulze, Ruhr-University of Bochum
Abstract ID: BAPS.2010.GEC.UF3.6
Abstract: UF3.00006 : Theoretical and experimental study of ion flux formation in an asymmetric high-frequency capacitive discharge*
3:15 PM–3:30 PM
Preview Abstract Abstract
Authors:
I. Schweigert
(Institute of Theoretical and Applied Mechanics SB RAS, Russia)
D. Ariskin
(Institute of Theoretical and Applied Mechanics SB RAS, Russia)
T. Chernoizyumskaya
(St.-Petersburg State Polytechnical University, Russia)
A. Smirnov
(St.-Petersburg State Polytechnical University, Russia)
*The authors gratefully acknowledge the support of this work by the Russian Foundation for Basic Research (grant No. 08-02-00833a).
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.UF3.6
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