Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session TF2: Plasma Nanotechnologies and Flexible Electronics II
10:30 AM–12:30 PM,
Friday, October 8, 2010
Room: Petit Amphitheatre
Chair: Tomohiro Nozaki, Tokyo Institute of Technology, Japan
Abstract ID: BAPS.2010.GEC.TF2.6
Abstract: TF2.00006 : Investigation of Plasma Interactions with Soft Materials via Combinatorial Plasma-Process Analyzer for Plasma Nano Processes
11:45 AM–12:00 PM
Preview Abstract Abstract
Authors:
Yuichi Setsuhara
(Osaka University)
Ken Cho
(Osaka University)
Kosuke Takenaka
(Osaka University)
Masaharu Shiratani
(Kyushu University)
Makoto Sekine
(Nagoya University)
Masaru Hori
(Nagoya University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.TF2.6
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