Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session KWP: Poster Session III (14:00-15:30)
2:00 PM,
Wednesday, October 6, 2010
Room: 8
Abstract ID: BAPS.2010.GEC.KWP.55
Abstract: KWP.00055 : Optimization of Plasma Parameters for Etching of Superconducting Radio Frequency Cavity surfaces in an Ar/Cl$_{2}$ RF plasma
Preview Abstract Abstract
Authors:
Janardan Upadhyay
(Old Dominion University)
Svetozar Popovic
(Old Dominion University)
Lepsha Vuskovic
(Old Dominion University)
Larry Phillips
(Thomas Jefferson National Accelerator Facility)
Anne-Marie Valente- Feliciano
(Thomas Jefferson National Accelerator Facility)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.KWP.55
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