Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session Index
Session FT: Special Evening Session |
Show Abstracts |
Chair: Makoto Sekine, Nagoya University Room: 151 |
Tuesday, October 5, 2010 8:00PM - 8:35PM |
FT.00001: Plasma Processing for Nanoelectronics --- History and Prospects Invited Speaker: Preview Abstract | |
Tuesday, October 5, 2010 8:35PM - 9:00PM |
FT.00002: Ion Molecule Collision Processes in Gaseous Electronics Invited Speaker: Preview Abstract | |
Tuesday, October 5, 2010 9:00PM - 9:20PM |
FT.00003: Current Issues for next generation large area and high rate plasma process for thin film deposition Invited Speaker: Preview Abstract | |
Tuesday, October 5, 2010 9:20PM - 9:30PM |
FT.00004: Academic Roadmap of Plasma Process Technologies Invited Speaker: Preview Abstract | |
Tuesday, October 5, 2010 9:30PM - 10:00PM |
FT.00005: Discussion Preview Abstract |
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